Special Issue, Proceedings of the International Conference on Micro & Nano Systems 2002 (ICMNS 2002) August 11 - 14, 2002, Kunming, China

• Bio-MEMS
  • Endothelial Cells: The Living Sensors and Actuators, by Tzung K. Hsiai et al., p. 169;
  • Bio-Electrochemical Characterization of Micromachined Two-Electrode Cell Sensors, by Xin-Xia Cai et al., p. 173;
  • Micro Flow Cytometers with Buried SU-8/SOG Optical Waveguides for On-line Cell Counting, by Che-Hsin Lin et al., p. 177;
  • Enhancing Antitumor Effect of Adriamycin Nanoparticle -Lipiodol Emulsion by Pretreating Tumor Cells with Diethyldithiocarbamate, by Dao-Cheng Wu et al., p. 181;
  • A Model of Directed Binding to Microtubules by Kinesin and Ncd Motor Proteins, by H. Bolterauer et al., p. 185
  • Micro-systems for Optical Protein-Chip, by Gang Jin et al., p. 191;
  • Design and Fabrication of a Micro Controller Based Glucose Sensor, by Toh Wei Da et al., p. 195;
  • A Micropipet Aspiration System to Measure the Kinetics of Selectin/Ligand Interactions, by Jun Huang et al., p. 199;
  • Driven by Electroosmotic Flow (EOF) in Poly (dimethylsiloxane)(PDMS)/Glass Microchip, by Qiang Zhao et al., p. 203;
  • Fabrication of Microfluidic Electrocontrolled Chip in Polydimethylsiloxane (PDMS), by Ming Wang et al., p. 207;
  • Development and Characterization of DNA Hybridization Reaction on PDMS Microchip, by Xiang Chen et al., p. 211;
  • MEMS-based Temperature Control Systems for DNA Amplification, by Chia-Yen Lee et al., p. 215;
  • Design and Microfabrication of Biochemical Reaction Chip, by Zhan Zhao et al., p. 219;
  • The Construction of Layered Architectures of Dendrimers-Adsorption Layers of Amino-terminated Dendrimers on 3-Mercaptoporopionic Acid Self-assembled Monolayer Formed on Au, by Hiroki Nagaoka et al., p. 223;
  • Perylene Derivative Based Self-Assembled Monolayer on ITO Electrode Surfaces, by Wen-Long Wang et al., p. 229;
  • Analysis of Thermal Cycling in Micro-PCR Chip, by Wei Wang et al., p. 233;
  • Design and CFD Analysis of the Flow in a Micro-fabricated PCR-Chip for Leukemia Diagnosis, by Qiao-Ling Zheng et al., p. 237;
  • Medical Image Compression Using Tree-Structured Vector Quantization and Fuzzy C-Means, by Sookpotharom Supot et al., p. 243;
  • A Two-State Model for the Transport of Molecular Motors, by Tong-Jun Zhao et al., p. 249;
  • Effective Potential and Efficiency for a Single Brownian Motor, by Yong Zhan et al., p. 253;
  • Nanostructure of Nacre and Its Mechanical Effects, by Fan Song et al., p. 257;
  • An experimental investigation of hollow fiber flow in Dialyzer, by Miao Li et al., p. 261;
• Micro & Nano Systems I
• Design and Rapid Fabrication of a Microfluidic Fraction Collector, by Bo-Zhi Yang et al., p. 267;
• A MEMS Flowmeter for Measuring Very Small Flow Rates, by Steve Tung et al., p. 273;
• Electrostatic MEMS Planar Fan for Enhancement of Fluid Mixing, by Zhi-Chun Ma et al., p. 277;
• Preparation of Ultra-Fine Calcium Silicate Powders, by Zeng GuiYu et al., p. 283;
• A Circular-Type Thermal Flow Direction Sensor with an Integrated Interface Circuit, by Seunghyun Kim et al., p. 289;
• Research on a Novel Integrated Pressure Sensor for High Temperature, by Wei Zhang et al., p. 295;
• Fabrication of Thin Film Vanadium Oxide for Microbolometer, by Chen-Kuei Chung et al., p. 299;
• An Uncooled Microbolometer Infrared Detector Based on Polycrystalline Silicon Germanium Thin Film, by Liang Dong et al., p. 303;
• A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling, by Zuan-Kai Wang et al., p. 307;
• Structural Failure Analysis and Numerical Simulation of Micro-accelerometers under Impulsive Loading, by Yu-Qun Hu et al., p. 311;
• A Novel Structure of Passive Ring Resonator on Silicon Substrate, by Wei Guo et al., p. 315;
• Phase and Vibration Analysis for a CMOS-MEMS Gyroscope, by Hui-Kai Xie et al., p. 319;
• A New Z-axis Silicon Micromachined Vibrating Gyroscope, by An-Ping Qiu et al., p. 325;
• Micro-machined Rate Gyroscope, by Yan Su et al., p. 329;
• Simulation of Vibratory Micromachined Gyroscope with Fence Structure, by Lu-Feng Che et al., p. 333;
• Symmetrical Design and Analysis of a Novel MEMS-based 1กม2 Optical Switch, by Cong-Shun Wang et al., p. 337;
• Simulation, Optimization and Measurement of MEMS Torsion Micro Mirrors for Optical MEMS Application, by Da-Chao Li et al., p. 341;
• Optical Alignment Applied for Solving Axis-Misaligned Errors in Micro Electro Mechanical Systems, by Rong Zhu et al., p. 345;
• Electromechanical Studies on Micro Torsion-Mirror Actuators with Monolithically Integrated Fiber Self-Holding Structures, by Wen-Gang Wu et al., p. 349;
Failure Modes of Doubly Supported Capacitive RF MEMS Switches, by Li-Xian Zhang et al., p. 353;
• Numerical Simulation of a Bulk Micromachined Relay with Lateral Contact, by Zhen-Chuan Yang et al., p. 357;
• Failure Mechanisms of a Micro Fabrication Relay, by Xiao-Dong Hu et al., p. 361;
• An Analytical Model for High Performance Capacitive RF MEMS Switch Design, by Ze-Wen Liu et al., p. 365;
• Design of a Novel Bulk Micro-machined RF MEMS Switch, by Hai-Xia Zhang et al., p. 369;
• Design and Analysis of a Micromachined Capacitive RF Shunt Switch with Composite Membrane , by Min Miao et al., p. 375;
• Fabrication and Characterization of Nickel Titanium Shape memory Thin Films by RF Magnetron Sputtering for MEMS Applications, by F. F. Gong et al., p. 379;
• Design and Modeling of a New Thermocouple Structure for Microwave Power Measurements, by De-Yong Chen et al., p. 383;
• Design of S-band TT&C Transponder for Pico-Satellites by Yi-Bin Xu et al., p. 387;
• Comparison Between the System Identification and the Neural Network Methods in Identifying a Model Helicopter's Yaw Movement, by Da-Rong Chen et al., p. 391;
• System Identification of a Model Helicopter's Yaw Movement Based on an Operator's Control, by Hao-Sheng Chen et al., p. 395;
• Micro-machined Conformal Silicon Molds for Wafer Bumping and Probing, by S. W. Ricky Lee et al., p. 399;
• Fabrication and Experimental Results of Lateral Trench Electrode IGBT, by Ey Goo Kang et al., p. 405;
• Micromachined Multilevel Silicon Structure by Anisotropic Wet Etching, by Chen-Kuei Chung et al., p. 411;
• Annealing Effect on the Adhesion of Stacked Films for MEMS, by Chen-Kuei Chung et al., p. 415;
• Measurement of Adhesive Force between Micro Surfaces with a Novel Micro Leverage Structure, by Miao Lu et al., p. 419;
• The Fabrication of Large Area Si3N4 Membrane Mounted with NiCr/Ni Thermocouples, by Jian-Gang Zhang et al., p. 423;
• Investigation of Laser-assisted Bonding for MEMS Packaging, by Yi Tao et al., p. 427;
• Flip Chip Technologies and Their Applications in MEMS Packaging, by Hai-Ying Wang et al., p. 433;
• Image-Based Calibration for Micromanipulators, byGuang-Yong Li et al., p. 437;
• Micro & Nano Systems II
• Effect of Microchannel on Improving the Photoelectro-chemical Performance of Nanostructured TiO2 Electrodes Sensitized by Ru Complex, by Tingli Ma et al., p. 445;
• Surface Finish and Performances of Read/Write Heads by Using Ultra-Fine Diamond Slurry in Polishing Process, by Jian-Bin Luo et al., p. 449;
• Chemical Mechanical Polishing of Computer Hard Disk Substrate in Colloidal SiO2 Slurry, by Hong Lei et al., p. 455
• Optical Sensing of Volatile Organic Compounds Using Metalloporphyrins Langmuir-Blodgett Films, by Muhamad Mat Salleh et al., p. 461;
• Nanotubes of Conducting Polyaniline and Polypyrrole, by Mei-Xiang Wan et al., p. 465;
• Molecular Dynamics and Quantum Mechanics Investigation on Mechanic-electric Behaviors of Nanotubes, by Wan-Lin Guo et al., p. 469;
• Fabrication of Nanorollers, by Yu-Jun Zhang et al., p. 473;
• Positioning Tables for Nanofabrication, by Pei-Zhang Yuan et al., p. 477;
• Lubrication Theory for Thin Film Lubrication Accouting for the ordered Film Model, by Chao-Hui Zhang et al., p. 481;
• Nano-microscale Characterizations to Al2O3/SiCnano Ceramic Composites, by Zhong Ling et al., p. 487;
• Study on Mechanical Properties of Nanocrystal Surface Layer of an Aluminum Alloy, by You-Li Ma et al., p. 491;
• The Effects of Experimental Parameters on the Orientation of AlN Nano Films, by Xiao-Hong Xu et al., p. 495;
• Surface Roughness Effect on the Tensile Strength of Micromachined Polysilicon Films, by Jian-Ning Ding et al., p. 499;
• Electrical Field Induced Effect in Nanocrystalline Gold Film during Deposition, by Chao-Guang Pu et al., p. 503;
• Study of Double-Base Thick Film Ceramic Material by Meng-Kui Wang, p. 507;
• Nanometer Scale Inerfacial Lubrication of PFPE Lubricants Z-DOL and AWA at Hard Disk Interface, by Wei Wang et al., p. 511;
• Preparation and Tribological Behavior of Perfluoropolyether Lubricant Film on ZrO2 Thin Film, by Jin-Qing Wang et al., p. 515;
• The Initial Sliding Microfriction Properties of Polysilicon Films, by Jian-Ning Ding et al., p. 519;
• Nano-frictional Behaviors on Etched Silicon (100) Surfaces, by Haifei Bao et al., p. 523;
• Fabrication Nano-structure Surface of Si-based Materials and Their Properties, by Jin-Jun Lu et al., p. 527;
• Effects Analysis on the Mechanical Properties of Nanocrystalline Materials, by Yue-Wu Liu et al., p. 531;
• Depth Dependence of Nanohardness in a CuAlNi Single Crystal Shape Memory Alloy, by Cheng Liu et al., p. 535;
• Phase Transformations of Micromachined Polysilicon Films under Nanoindentations, by Jian-Ning Ding et al., p. 539;
• Theoretical Methods for Nanoindentation; by Ming Li et al., p. 543;
• Theoretical Study on Effect of the Size of Silver Nanoparticles on the localized Surface Plasmon Resonance Spectrum of Silver Nanoparticles Embedded in BaO Thin Film, by Hai Yang et al., p. 549;
• Preparation of Ultra-Fine Calcium Silicate Powders, by Gui-Yu Zeng et al., p. 553;
• Preparation of VOP Ultra-fine Particles by Supercritical Fluid Drying, by Ling Zeng et al., p. 557;
• Simulation, Characterization & Modeling Lyapunov Exponents of a Micro Chaotic Mixer, by Yi-Kuen Lee, p. 561;
• The Pumping Effect of Traveling Phase Transition in Microtubes, by Mo-Ran Wang et al., p. 565;
• Fiber Ring Laser Intra-cavity Absorption Spectroscopy for Gas Sensing, by M. Zhang et al., p. 569;
• Discussion about the Similarity of Micro-scale Gas Flows, by Feng-Hua Qin et al., p. 573;
• Proceeding of Experiments about Liquid Flow through Microtubes, by Zhan-Hua Li et al., p. 577;
• Characteristics of the Localized Interface Optical-phonon Modes in Triple-constitution Superlatticeswith Defect Layers, by Ben-Yuan Gu et al., p. 581;
• The Simulation on the Microelectromechanical Tunable F-P Optical Filter, by Hao Feng et al., p. 585;
• Topology Optimization for Stable Non-linear Structures, by Zhen-Yu Liu et al., p. 589;
• Improvement of Micro End Milling Tools through Variation of Tool Manufacturing Method and Geometry, by J. Schmidt et al., p. 595;
• A Model of Computation of Elastic and Plastic Contact Considering Adhesion Effect, by Qun-Yang Li et al., p. 599;
• Characterization and Modeling of a Curved Electrostatic Actuator, by Su-Yan Liu et al., p. 603;
• Method for Reducing Reactive Ion Etching Lag in MEMS Process, by Chen-Kuei Chung et al., p. 609;
• Relative Importance of Natural Convection and Surface Radiation in a Square Enclosure, by Na Li et al., p. 613;
• Characterization of Electronic Transients by an Ultrafast Scanning Tunneling Microscope, by Tian Lan et al., p. 617;
• Simulation of Contact Interaction of Nanometer Objects Pushing Using AFM Cantilever as Manipulator, by Xiao-Peng Yu et al., p. 621;
• Optical Module for a Near-Field Hybrid Recording System Using the Diffractive Optical Element (DOE), by Jian-Shian Lin et al., p. 627;
• M-Test Method for Measuring Mechanical Property of Multi-layer in MEMS, by Yan-Feng Jiang et al., p. 631;
• Rotor Manipulation Mechanism for Micro Unmanned Helicopter, by Jun-Gang Lu et al., p. 635;
• Mechanical Model of Laterally Driven Polysilicon Microresonant, by Xiao-Yang Chen et al., p. 639;
• Microstructure, Mechanical and Magnetic Properties of FeTiN Thin Films by IBAD, by Ji Zhang et al., p. 643;
• Micromechanical Characterization of TiN Films on 9Cr18 Steels, by Tai-Hua Zhang et al., p. 649;
• Deformation Measurement of a Small Component and a Thin Film Using Time Sequence Speckle Pattern Interferometry, by Xi-De Li et al., p. 653;
• Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films, by Jian-Ning Ding et al., p. 657;
• Properties and Structure of High Coercivity Sm (Co, Al, Si) /Cr Sputtered Thin Films, by Xiang Wang et al., p. 661;
• Reliability of Electrostatic MEMS: Charge Accumulation in Dielectric Layer, by Xu-Yuan Chen et al., p. 665;
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• Electrical Properties of Multilayer-chip ZnO Varistors, by Xue-Ya Kang et al., p. 671;
• Electrical Properties of Boron and Phosphorus Doped Polycrystalline Silicon Germanium Films, by Liang Dong et al., p. 677;
• Study of Fracture Behavior of Piezoelectric Ceramics with Defects, by Zhen-Ke Zhang et al., p. 681;
• Onset of Adiabatic Shear Instability in Strain Gradient Dependent Metal Matrix Composites, by L.-H. Dai et al., p. 685;
• Crack Tip Fields with Strain Gradient Effects, by S.-H. Chen et al., p. 689;
• 3D Simulation of the Micro Indentation Process and Relative Problems Research, by Min Li et al., p. 695;
• Size Effects in Micro-bending Deformation of MEMS Devices Based on the Discrete Dislocation Theory, by Shan Tang et al., p. 699;
• Reflection of Magneto-thermoelastic Waves under Thermoelasticity without Energy Dissipation, by Ya-Qin Song et al., p. 703;
• Morphological Dynamic Simulation of Cluster of Atoms Deposition Process, by Jenn-Sen Lin et al., p. 707;
• Atomic Stick-slip Friction between Commensurate Self-assembled Monolayers, by Tao Zhang et al., p. 713;
• Freezing Atom Method in Molecular Dynamics Simulation, by Wan-Lin Guo et al., p. 717;
• The Infrared Absorption's Phonon Model of the Nanometer Powder, by Ying-tang Zhang, p. 721;
• The Inner Pressure of the Atoms in a Solid in Refined TFD Theory, by Ru-Zeng Zhu et al., p. 723;
• Analysis of Residual Stress Gradient in MEMS Multi-layer Structure, by Jin Qian et al., p. 727;
• Late Papers and Abstracts
• Fabrication, Characterization and Property of Aligned Multi-walled Carbon nanotubes, by S. S. Xie et al., p. 731;
• Nanostructuring Based on Scanning Probe Microscopy and Bottom Up Assembly for Future Nanoelectronic Devices, by Zhongfan Liu, p. 733;
• Intrinsic Vibration of Multiwalled Carbon Nanotubes, by C.Q. Ru, p. 735;
• Paths Linking Micro and Nano Sciences and Technologies, by Chih-Ming Ho, p. 737;
• Integrated Micro/Nano Fluidics for Mass-spectrometry Protein Analysis, by Yu-Chong Tai et al., p. 739;
• Autonomous Multi-robot Sensor-Based Cooperation for Nanomedicine, by Adriano Cavalcanti et al., p. 743;
• Surface Functionalisation, Orientation, Conformation and Positioning of Macromolecules at the Nanometer Scale, by Sven Oscarsson, p. 747;
• Advances in Quantum Computing and Control, by Tzyh-Jong Tarn, p. 751;
• Fabrication and Property Analysis of MWNT Junctions through Nanorobotic Manipulations, by Thshio Fukuda et al., p. 753;
• Applications of Oriented Batch-CNT, by s Multi-robot Sensor-Based Cooperation for Nanomedicine, by Yao Cheng et al., p. 759;
• Fabrication of Submicro Channels in Quartz Cubes Using Laser-induced Splitting, by S.J. Qin et al., p. 763;
• Dependence of AC Electrophoresis Carbon Nanotube Manipulation on Microelectrode Geometry, by Victor T.S. Wong et al., p. 769;
• A Polymer-based Micro Thermal Actuator for Micromanipulations in Aqueous Environment, by Ho-Yin Chan et al., p. 775;
• Simulation of Thin Metal Film Bonding for MEMS Applications Inside a Microwave Cavity, by Jason Clendenin et al., p. 779;
• Morphology Correlation to the Superhydrophobicity in an Organic Thin Film on Rough Al; by Sili Ren et al., p. 785;
• Fabrication of an Electrothermally Actuated Electrostatic Microgripper, by Sang H. Lee et al., p. 789;